Analysis of ferroelectric properties of ALD-Hf0.5Zr0.5O2 thin films according to oxygen sources
Titel:
Analysis of ferroelectric properties of ALD-Hf0.5Zr0.5O2 thin films according to oxygen sources
Auteur:
Lee, Seungbin Jung, Yong Chan Park, Hye Ryeon Park, Seongbin Kang, Jongmug Jeong, Juntak Choi, Yeseo Kim, Jin-Hyun Mohan, Jaidah Kim, Harrison Sejoon Kim, Jiyoung Kim, Si Joon