Combination of selective area sublimation of p-GaN and regrowth of AlGaN for the co-integration of enhancement mode and depletion mode high electron mobility transistors
Titel:
Combination of selective area sublimation of p-GaN and regrowth of AlGaN for the co-integration of enhancement mode and depletion mode high electron mobility transistors
Auteur:
Ngo, Thi Huong Comyn, Rémi Chenot, Sébastien Brault, Julien Damilano, Benjamin Vézian, Stéphane Frayssinet, Eric Cozette, Flavien Defrance, Nicolas Lecourt, François Labat, Nathalie Maher, Hassan Cordier, Yvon