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Improved fabrication of fully-recessed normally-off SiN/SiO2/GaN MISFET based on the self-terminated gate recess etching technique |
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Titel: |
Improved fabrication of fully-recessed normally-off SiN/SiO2/GaN MISFET based on the self-terminated gate recess etching technique |
Auteur: |
Li, Mengjun Wang, Jinyan Zhang, Bin Tao, Qianqian Wang, Hongyue Cao, Qirui Huang, Chengyu Liu, Jingqian Mo, Jianghui Wu, Wengang Cai, Shujun |
Verschenen in: |
Solid-state electronics |
Paginering: |
Jaargang 177 () nr. C pagina's p. |
Jaar: |
2021 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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