Improvement in drain-induced-barrier-lowering and on-state current characteristics of bulk Si fin field-effect-transistors using high temperature Phosphorus extension ion implantation
Titel:
Improvement in drain-induced-barrier-lowering and on-state current characteristics of bulk Si fin field-effect-transistors using high temperature Phosphorus extension ion implantation
Auteur:
Kikuchi, Yoshiaki Hopf, Toby Mannaert, Geert Everaert, Jean-Luc Kubicek, Stefan Eyben, Pierre Waite, Andrew del Agua Borniquel, Jose Ignacio Variam, Naushad Mocuta, Dan Horiguchi, Naoto