Scaling/LER study of Si GAA nanowire FET using 3D finite element Monte Carlo simulations
Titel:
Scaling/LER study of Si GAA nanowire FET using 3D finite element Monte Carlo simulations
Auteur:
Elmessary, Muhammad A. Nagy, Daniel Aldegunde, Manuel Seoane, Natalia Indalecio, Guillermo Lindberg, Jari Dettmer, Wulf Perić, Djordje García-Loureiro, Antonio J. Kalna, Karol