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Journal description
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Details for article 9 of 30 found articles
| Title: |
Extraction of roughness parameters at nanometer scale by Monte Carlo simulation of Critical Dimension Scanning Electron Microscopy |
| Author: |
Ciappa, M. Ilgünsatiroglu, E. Illarionov, A.Yu. |
| Appeared in: |
Solid-state electronics |
| Paging: | Volume 113 (2015) nr. C pages 6 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 30 found articles
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