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Journal description
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Details for article 76 of 107 found articles
| Title: |
Plasma etching and feature evolution of organic low-k material by using VicAddress |
| Author: |
Makabe, T. Shimada, T. Yagisawa, T. |
| Appeared in: |
Computer physics communications |
| Paging: | Volume 177 (2007) nr. 1-2 pages 4 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 76 of 107 found articles
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