Enhanced nucleation, smoothness and conformality of ultrananocrystalline diamond (UNCD) ultrathin films via tungsten interlayers
Titel:
Enhanced nucleation, smoothness and conformality of ultrananocrystalline diamond (UNCD) ultrathin films via tungsten interlayers
Auteur:
Naguib, Nevin N. Elam, Jeffrey W. Birrell, James Wang, Jian Grierson, David S. Kabius, Bernd Hiller, Jon M. Sumant, Anirudha V. Carpick, Robert W. Auciello, Orlando Carlisle, John A.