Effect of carbon concentration on optical and structural properties in the transition from Silicon Rich Oxide to SiCxOy films formation
Titel:
Effect of carbon concentration on optical and structural properties in the transition from Silicon Rich Oxide to SiCxOy films formation
Auteur:
Coyopol, A. Vásquez-Agustín, M.A. García-Salgado, G. López-Ramírez, R. Romano-Trujillo, R. Jiménez-Vivanco, M.R. Rosendo, E. Morales, C. Galeazzi, R. Pérez-García, S.A.