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The effect of deposition processing on structural and luminescent properties of a-SiOC:H thin films fabricated by RF-magnetron sputtering |
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Title: |
The effect of deposition processing on structural and luminescent properties of a-SiOC:H thin films fabricated by RF-magnetron sputtering |
Author: |
Vasin, A.V. Rusavsky, A.V. Kysil, D.V. Prucnal, S. Piryatinsky, Yu.P. Starik, S.P. Nasieka, Iu. Strelchuk, V.V. Lysenko, V.S. Nazarov, A.N. |
Appeared in: |
Journal of luminescence |
Paging: |
Volume 191 (2017) nr. PB pages 5 p. |
Year: |
2017 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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