Photoluminescence comparison of SRO-LPCVD films deposited on quartz, polysilicon and silicon substrates
Titel:
Photoluminescence comparison of SRO-LPCVD films deposited on quartz, polysilicon and silicon substrates
Auteur:
Martínez-Hernández, H.P. Luna López, J.A. Aceves Mijares, M. Monfil Leyva, K. García Salgado, G. Hernández-de-la-Luz, J.A.D. Luna Flores, A. Morales-Caporal, R. Ramírez Amador, R. Hernández Simón, Z.J.