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Details for article 2 of 15 found articles
| Title: |
Atomic layer deposition of rutile and TiO2-II from TiCl4 and O3 on sapphire: Influence of substrate orientation on thin film structure |
| Author: |
Möldre, Kristel Aarik, Lauri Mändar, Hugo Niilisk, Ahti Rammula, Raul Tarre, Aivar Aarik, Jaan |
| Appeared in: |
Journal of crystal growth |
| Paging: | Volume 428 (2015) nr. C pages 7 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 15 found articles
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