|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 6 of 35 found articles
| Title: |
Atomic scale simulation of physical sputtering of silicon oxide and silicon nitride thin films |
| Author: |
Kim, Dong-Ho Lee, Gun-Hwan Yup Lee, Seung Hyun Kim, Do |
| Appeared in: |
Journal of crystal growth |
| Paging: | Volume 286 (2006) nr. 1 pages 7 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 35 found articles
| << previous | next >> |