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Journal description
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Details for article 6 of 15 found articles
| Title: |
Deposition of ultrafine particles on semiconductors for use as dry etching masks: Numerical calculation and experimental verification |
| Author: |
Stratmann, F. Wiedensohler, A. Maximov, I. Samuelson, L. Hansson, H.C. Fissan, H.J. |
| Appeared in: |
Journal of aerosol science |
| Paging: | Volume 24 (1993) nr. 5 pages 4 p. |
| Year: |
1993 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 15 found articles
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