|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 13 of 14 found articles
| Title: |
Thermophoretic effect of particle deposition on a free standing semiconductor wafer in a clean room |
| Author: |
Ye, Y. Pui, D.Y.H. Liu, B.Y.H. Opiolka, S. Blumhorst, S. Fissan, H. |
| Appeared in: |
Journal of aerosol science |
| Paging: | Volume 22 (1991) nr. 1 pages 10 p. |
| Year: |
1991 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 14 found articles
| << previous | next >> |