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                                       Details for article 4 of 8 found articles
 
 
  Development of specimen and test method for strength analysis of MEMS micromirror
 
 
Title: Development of specimen and test method for strength analysis of MEMS micromirror
Author: Izumi, Satoshi
Ping, Chan Wee
Yamaguchi, Makoto
Sakai, Shinsuke
Ueda, Yuzuru
Suzuki, Atsushi
Appeared in: Engineering fracture mechanics
Paging: Volume 72 (2005) nr. 17 pages 14 p.
Year: 2005
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 4 of 8 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands