Benchmarking diamond surface preparation and fluorination via inductively coupled plasma-reactive ion etching
Titel:
Benchmarking diamond surface preparation and fluorination via inductively coupled plasma-reactive ion etching
Auteur:
Gray, Tia Zhang, Xiang Biswas, Abhijit Terlier, Tanguy Oliveira, Eliezer F. Puthirath, Anand B. Li, Chenxi Pieshkov, Tymofii S. Garratt, Elias J. Neupane, Mahesh R. Pate, Bradford B. Birdwell, A. Glen Ivanov, Tony G. Vajtai, Robert Ajayan, Pulickel M.