Renewable single-walled carbon nanotube membranes for extreme ultraviolet pellicle applications
Titel:
Renewable single-walled carbon nanotube membranes for extreme ultraviolet pellicle applications
Auteur:
Ramirez B., Javier A. Krasnikov, Dmitry V. Gubarev, Vladimir V. Novikov, Ilya V. Kondrashov, Vladislav A. Starkov, Andrei V. Krivokorytov, Mikhail S. Medvedev, Vyacheslav V. Gladush, Yuriy G. Nasibulin, Albert G.