Water-assisted, electron-beam induced activation of carbon nanotube catalyst supports for mask-less, resist-free patterning
Titel:
Water-assisted, electron-beam induced activation of carbon nanotube catalyst supports for mask-less, resist-free patterning
Auteur:
Carpena-Núñez, Jennifer Davis, Benjamin Islam, Ahmad Ehteshamul Brown, Josef Sargent, Gordon Murphy, Neil Back, Tyson Maschmann, Matthew R. Maruyama, Benji