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Influence of deposition pressure on structural, optical and electrical properties of nc-Si:H films deposited by HW-CVD |
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Title: |
Influence of deposition pressure on structural, optical and electrical properties of nc-Si:H films deposited by HW-CVD |
Author: |
Bakr, N.A. Funde, A.M. Waman, V.S. Kamble, M.M. Hawaldar, R.R. Amalnerkar, D.P. Sathe, V.G. Gosavi, S.W. Jadkar, S.R. |
Appeared in: |
Journal of physics and chemistry of solids |
Paging: |
Volume 72 (2011) nr. 6 pages 7 p. |
Year: |
2011 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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