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Journal description
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Details for article 60 of 112 found articles
| Title: |
Interface integration defect of copper and low-K materials beyond nano-scale copper damascene process |
| Author: |
Chen, Kei-Wei Wang, Ying-Lang Tsao, Jung-Chih Juang, Yungder Lee, Feng-Yi |
| Appeared in: |
Journal of physics and chemistry of solids |
| Paging: | Volume 69 (2008) nr. 2-3 pages 4 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 60 of 112 found articles
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