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                                       Details for article 36 of 41 found articles
 
 
  Reaction factorization for the dynamic analysis of atomic layer deposition kinetics
 
 
Title: Reaction factorization for the dynamic analysis of atomic layer deposition kinetics
Author: Remmers, Elizabeth M.
Travis, Curtisha D.
Adomaitis, Raymond A.
Appeared in: Chemical engineering science
Paging: Volume 127 (2015) nr. C pages 18 p.
Year: 2015
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 36 of 41 found articles
 
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