On the role of halides and thiols in additive-assisted copper electroplating
Titel:
On the role of halides and thiols in additive-assisted copper electroplating
Auteur:
Huynh, Thi M.T. Weiss, Florian Hai, Nguyen T.M. Reckien, Werner Bredow, Thomas Fluegel, Alexander Arnold, Marco Mayer, Dieter Keller, Hubert Broekmann, Peter