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  Adsorption of Pd nanoparticles catalyst in high aspect ratio through-Si vias for electroless deposition
 
 
Title: Adsorption of Pd nanoparticles catalyst in high aspect ratio through-Si vias for electroless deposition
Author: Inoue, Fumihiro
Shimizu, Tomohiro
Miyake, Hiroshi
Arima, Ryohei
Ito, Toshihiko
Seki, Hirofumi
Shinozaki, Yuko
Yamamoto, Tomohiko
Shingubara, Shoso
Appeared in: Electrochimica acta
Paging: Volume 82 (2012) nr. C pages 6 p.
Year: 2012
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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