|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 17 of 24 found articles
| Title: |
Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurry. Part I. Elucidating slurry chemistry |
| Author: |
Nagar, Magi Starosvetsky, David Vaes, Jan Ein-Eli, Yair |
| Appeared in: |
Electrochimica acta |
| Paging: | Volume 55 (2010) nr. 10 pages 12 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 24 found articles
| << previous | next >> |