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Journal description
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Details for article 28 of 48 found articles
| Title: |
Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions |
| Author: |
Bernard, M.C. Gabrielli, C. Joiret, S. Mace, C. Ostermann, E. Pailleret, A. |
| Appeared in: |
Electrochimica acta |
| Paging: | Volume 53 (2007) nr. 3 pages 11 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 48 found articles
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