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Journal description
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Details for article 4 of 41 found articles
| Title: |
Characterization of phosphate electrolytes for use in Cu electrochemical mechanical planarization |
| Author: |
Shattuck, Kristin G. Lin, Jeng-Yu Cojocaru, Paula West, Alan C. |
| Appeared in: |
Electrochimica acta |
| Paging: | Volume 53 (2008) nr. 28 pages 6 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 41 found articles
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