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                                       Details for article 24 of 45 found articles
 
 
  End-point detection of copper super-filling in small features under a potentiostatic mode of operation
 
 
Title: End-point detection of copper super-filling in small features under a potentiostatic mode of operation
Author: Starosvetsky, David
Sezin, Nina
Kovler, Mark
Ein-Eli, Yair
Appeared in: Electrochimica acta
Paging: Volume 53 (2008) nr. 27 pages 6 p.
Year: 2008
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 24 of 45 found articles
 
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