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Journal description
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Details for article 24 of 45 found articles
| Title: |
End-point detection of copper super-filling in small features under a potentiostatic mode of operation |
| Author: |
Starosvetsky, David Sezin, Nina Kovler, Mark Ein-Eli, Yair |
| Appeared in: |
Electrochimica acta |
| Paging: | Volume 53 (2008) nr. 27 pages 6 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 24 of 45 found articles
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