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Journal description
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Details for article 10 of 36 found articles
| Title: |
Electrodeposition of Ru by atomic layer deposition (ALD) |
| Author: |
Thambidurai, Chandru Kim, Youn-Geun Stickney, John L. |
| Appeared in: |
Electrochimica acta |
| Paging: | Volume 53 (2008) nr. 21 pages 8 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 36 found articles
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