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                                       Details for article 43 of 108 found articles
 
 
  Electrochemical trench etching of silicon triggered via mechanical nanocontacts
 
 
Title: Electrochemical trench etching of silicon triggered via mechanical nanocontacts
Author: Gassilloud, R.
Schmuki, P.
Michler, J.
Appeared in: Electrochimica acta
Paging: Volume 53 (2007) nr. 2 pages 5 p.
Year: 2007
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 43 of 108 found articles
 
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