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                                       Details for article 24 of 90 found articles
 
 
  Dual functionality of DTPMP and OHA: Enhancement in removal rates and excellent surface quality of cobalt CMP
 
 
Title: Dual functionality of DTPMP and OHA: Enhancement in removal rates and excellent surface quality of cobalt CMP
Author: She, Liunan
Di, Yingqi
Zhai, Le
Cheng, Jie
Pan, Guofeng
Qi, Yuhang
Appeared in: Electrochimica acta
Paging: Volume 513 () nr. C pages p.
Year: 2025
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 24 of 90 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands