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                                       Details for article 15 of 51 found articles
 
 
  Effects of electrolyte type and concentration on the anodic oxidation of 4H-SiC (0001) in slurryless electrochemical mechanical polishing
 
 
Title: Effects of electrolyte type and concentration on the anodic oxidation of 4H-SiC (0001) in slurryless electrochemical mechanical polishing
Author: Yang, Xiaozhe
Yang, Xu
Yamamura, Kazuya
Appeared in: Electrochimica acta
Paging: Volume 474 () nr. C pages p.
Year: 2024
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15 of 51 found articles
 
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