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                                       Details for article 17 of 93 found articles
 
 
  CMOS-compatible electrochemical nanoimprint: High throughput fabrication of ordered microstructures on semiconductor wafer by using a glassy carbon mold
 
 
Title: CMOS-compatible electrochemical nanoimprint: High throughput fabrication of ordered microstructures on semiconductor wafer by using a glassy carbon mold
Author: Sun, Wanshi
Xu, Hantao
Han, Lianhuan
Wang, Chao
Ye, Zuoyan
Su, Jian-Jia
Wu, Yuan-Fei
Luo, Shiyi
Zhan, Dongping
Appeared in: Electrochimica acta
Paging: Volume 462 () nr. C pages p.
Year: 2023
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 17 of 93 found articles
 
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