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Achieving on chip micro-supercapacitors based on CrN deposited by bipolar magnetron sputtering at glancing angle |
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Title: |
Achieving on chip micro-supercapacitors based on CrN deposited by bipolar magnetron sputtering at glancing angle |
Author: |
Haye, Emile Achour, Amine Guerra, Abdelouadoud Moulaï, Fatsah Hadjersi, Toufik Boukherroub, Rabah Panepinto, Adriano Brousse, Thierry Pireaux, Jean-Jacques Lucas, Stephane |
Appeared in: |
Electrochimica acta |
Paging: |
Volume 324 (2019) nr. C pages p. |
Year: |
2019 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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