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                                       Details for article 17 of 105 found articles
 
 
  Cu direct electrodeposition using step current for superfilling on Ru-Al2O3 layer
 
 
Title: Cu direct electrodeposition using step current for superfilling on Ru-Al2O3 layer
Author: Kim, Myung Jun
Choe, Seunghoe
Kim, Hoe Chul
Lee, Seung-Joon
Kim, Soo-Hyun
Kwon, Oh Joong
Kim, Jae Jeong
Appeared in: Electrochimica acta
Paging: Volume 147 (2014) nr. C pages 9 p.
Year: 2014
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 17 of 105 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands