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Journal description
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Details for article 34 of 57 found articles
| Title: |
Kinetic Monte Carlo simulation of three-dimensional shape evolution with void formation using Solid-by-Solid model: Application to via and trench filling |
| Author: |
Kaneko, Yutaka Hiwatari, Yasuaki Ohara, Katsuhiko Asa, Fujio |
| Appeared in: |
Electrochimica acta |
| Paging: | Volume 100 (2013) nr. C pages 8 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 34 of 57 found articles
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