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Journal description
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Details for article 21 of 57 found articles
| Title: |
Electroless Cu deposition on atomic layer deposited Ru as novel seed formation process in through-Si vias |
| Author: |
Inoue, Fumihiro Philipsen, Harold Radisic, Aleksandar Armini, Silvia Civale, Yann Leunissen, Peter Kondo, Muneharu Webb, Eric Shingubara, Shoso |
| Appeared in: |
Electrochimica acta |
| Paging: | Volume 100 (2013) nr. C pages 9 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 57 found articles
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