nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
A new approach for handling and transferring of thin semiconductor materials
|
Bagdahn, J. |
|
2003 |
9 |
3 |
p. 204-209 |
artikel |
2 |
Chemical mechanical polishing as a toolbox for thin film magnetic head manufacturing
|
van Heeren, H. |
|
2003 |
9 |
3 |
p. 155-158 |
artikel |
3 |
Generation of 3-dimensional microstructure by metal jet
|
Yamaguchi, K. |
|
2003 |
9 |
3 |
p. 215-219 |
artikel |
4 |
High-aspect-ratio microstructures fabricated by X-ray lithography of polymethylsilsesquioxane-based spin-on glass thick films
|
Liu, Y. |
|
2003 |
9 |
3 |
p. 171-175 |
artikel |
5 |
Injection molding for microstructures controlling mold-core extrusion and cavity heat-flux
|
Yan, C. |
|
2003 |
9 |
3 |
p. 188-191 |
artikel |
6 |
LiGA measurement and acceptance evaluation
|
Dearth, B. L. |
|
2003 |
9 |
3 |
p. 197-203 |
artikel |
7 |
Mechanical behavior of aluminum foils as micro structural material under low velocity impact loading
|
Auzanneau, T. |
|
2003 |
9 |
3 |
p. 183-187 |
artikel |
8 |
Micro-structured flow fields for small fuel cells
|
Müller, M. |
|
2003 |
9 |
3 |
p. 159-162 |
artikel |
9 |
Numerical simulation of thermal distortions in deep and ultra deep X-ray lithography
|
Achenbach, S. |
|
2003 |
9 |
3 |
p. 220-224 |
artikel |
10 |
Restrictions in the design of gear wheel components and drives for micro technology
|
Albers, A. |
|
2003 |
9 |
3 |
p. 192-196 |
artikel |
11 |
Study of silicon backside damage in deep reactive ion etching for bonded silicon–glass structures
|
Yoshida, Y. |
|
2003 |
9 |
3 |
p. 167-170 |
artikel |
12 |
Surface roughness control by energy shift in deep X-ray lithography
|
Cheng, Y. |
|
2003 |
9 |
3 |
p. 163-166 |
artikel |
13 |
Ultra thin ICs and MEMS elements: techniques for wafer thinning, stress-free separation, assembly and interconnection
|
Feil, M. |
|
2003 |
9 |
3 |
p. 176-182 |
artikel |
14 |
Uncertainty in measurement of semiconductor piezoresistive sensors
|
Hoa, P. L. P. |
|
2003 |
9 |
3 |
p. 210-214 |
artikel |