| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A compact package for integrated silicon thermal gas flow meters
|
Bruschi, P.
|
|
2007
|
14 |
7 |
p. 943-949
|
artikel
|
| 2 |
A novel x-axis tuning fork gyroscope with “8 vertical springs-proofmass” structure on (111) silicon
|
Duan, Fei
|
|
2008
|
14 |
7 |
p. 1009-1013
|
artikel
|
| 3 |
A two-step etching method to fabricate nanopores in silicon
|
Wang, Gou-Jen
|
|
2007
|
14 |
7 |
p. 925-929
|
artikel
|
| 4 |
Biodegradable polylactic acid microstructures for scaffold applications
|
Wang, Gou-Jen
|
|
2007
|
14 |
7 |
p. 989-993
|
artikel
|
| 5 |
Copper planar microcoils applied to magnetic actuation
|
Woytasik, Marion
|
|
2007
|
14 |
7 |
p. 951-956
|
artikel
|
| 6 |
Design and characterization of a humidity sensor realized in LTCC-technology
|
Smetana, W.
|
|
2007
|
14 |
7 |
p. 979-987
|
artikel
|
| 7 |
Design and fabrication of the suspended high-Q spiral inductors with X-beams
|
Hsieh, M. C.
|
|
2008
|
14 |
7 |
p. 903-907
|
artikel
|
| 8 |
Development and application of a diaphragm micro-pump with piezoelectric device
|
Ma, H. K.
|
|
2007
|
14 |
7 |
p. 1001-1007
|
artikel
|
| 9 |
Development of a nanostructural microwave probe based on GaAs
|
Ju, Y.
|
|
2007
|
14 |
7 |
p. 1021-1025
|
artikel
|
| 10 |
Editorial to special issue on design, test, integration and packaging of MEMS/MOEMS, 2007
|
Courtois, Bernard
|
|
2008
|
14 |
7 |
p. 893
|
artikel
|
| 11 |
Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors
|
Wang, Yu-Hsiang
|
|
2007
|
14 |
7 |
p. 995-1000
|
artikel
|
| 12 |
Experimental characterization of electrostatically actuated in-plane bending of microcantilevers
|
Ballestra, A.
|
|
2008
|
14 |
7 |
p. 909-918
|
artikel
|
| 13 |
Focussed ion beam based fabrication of micro-electro-mechanical resonators
|
Grogg, Daniel
|
|
2007
|
14 |
7 |
p. 1049-1053
|
artikel
|
| 14 |
From MEMS devices to smart integrated systems
|
Soeraasen, O.
|
|
2008
|
14 |
7 |
p. 895-901
|
artikel
|
| 15 |
Lamination and laser structuring for a microwell array
|
Jung, Erik
|
|
2007
|
14 |
7 |
p. 931-936
|
artikel
|
| 16 |
Microcantilever-based weather station for temperature, humidity and flow rate measurement
|
Ma, Rong-Hua
|
|
2007
|
14 |
7 |
p. 971-977
|
artikel
|
| 17 |
Miniaturized variable-focus lens fabrication using liquid filling technique
|
Yang, Hsiharng
|
|
2008
|
14 |
7 |
p. 1067-1072
|
artikel
|
| 18 |
Modeling of large area hot embossing
|
Worgull, M.
|
|
2008
|
14 |
7 |
p. 1061-1066
|
artikel
|
| 19 |
Monotonic and fatigue testing of freestanding submicron thin beams application for MEMS
|
Lin, Ming-Tzer
|
|
2007
|
14 |
7 |
p. 1041-1048
|
artikel
|
| 20 |
New horizontal frustum optical waveguide fabrication using UV proximity printing
|
Lin, Tsung-Hung
|
|
2008
|
14 |
7 |
p. 1035-1040
|
artikel
|
| 21 |
Polysilicon micro beams buckling with temperature-dependent properties
|
Shamshirsaz, M.
|
|
2008
|
14 |
7 |
p. 957-961
|
artikel
|
| 22 |
Sensing liquid density using resonant flexural plate wave devices with sol–gel PZT thin films
|
Yu, Jyh-Cheng
|
|
2008
|
14 |
7 |
p. 1087
|
artikel
|
| 23 |
Sensing liquid density using resonant flexural plate wave devices with sol–gel PZT thin films
|
Yu, Jyh-Cheng
|
|
2008
|
14 |
7 |
p. 1073-1079
|
artikel
|
| 24 |
Silicon microneedle array with biodegradable tips for transdermal drug delivery
|
Chen, Bangtao
|
|
2007
|
14 |
7 |
p. 1015-1019
|
artikel
|
| 25 |
Silicon on nothing MEMS electromechanical resonator
|
Durand, Cédric
|
|
2007
|
14 |
7 |
p. 1027-1033
|
artikel
|
| 26 |
Solving functional reliability issue for an optical electrostatic switch
|
Camon, H.
|
|
2008
|
14 |
7 |
p. 919-923
|
artikel
|
| 27 |
Studies of polymer deformation and recovery in micro hot embossing
|
Shan, Xuechuan
|
|
2007
|
14 |
7 |
p. 1055-1060
|
artikel
|
| 28 |
Study of a piezoelectric multimorph based micro-scanner
|
Chaehoi, A.
|
|
2008
|
14 |
7 |
p. 963-969
|
artikel
|
| 29 |
Surface generation analysis in micro end-milling considering the influences of grain
|
Wang, J. S.
|
|
2007
|
14 |
7 |
p. 937-942
|
artikel
|
| 30 |
Usage of porous Al2O3 layers for RH sensing
|
Timár-Horváth, Veronika
|
|
2007
|
14 |
7 |
p. 1081-1086
|
artikel
|
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