| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Editorial
|
Setter, N.
|
|
2004
|
12 |
1-2 |
p. 5-6
|
artikel
|
| 2 |
Electroceramic Thick Film Fabrication for MEMS
|
Dorey, R.A.
|
|
2004
|
12 |
1-2 |
p. 19-32
|
artikel
|
| 3 |
MEMS for Optical Functionality
|
Kim, S.
|
|
2004
|
12 |
1-2 |
p. 133-144
|
artikel
|
| 4 |
Microfabrication of Piezoelectric MEMS
|
Baborowski, J.
|
|
2004
|
12 |
1-2 |
p. 33-51
|
artikel
|
| 5 |
Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
|
Muralt, P.
|
|
2004
|
12 |
1-2 |
p. 101-108
|
artikel
|
| 6 |
Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
|
Alexe, M.
|
|
2004
|
12 |
1-2 |
p. 69-88
|
artikel
|
| 7 |
Piezoelectric Microactuator Devices
|
Maeda, R.
|
|
2004
|
12 |
1-2 |
p. 89-100
|
artikel
|
| 8 |
RF Bulk Acoustic Wave Resonators and Filters
|
Loebl, H.P.
|
|
2004
|
12 |
1-2 |
p. 109-118
|
artikel
|
| 9 |
Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
|
Auciello, O.
|
|
2004
|
12 |
1-2 |
p. 119-131
|
artikel
|
| 10 |
Submicrometer-Scale Patterning of Ceramic Thin Films
|
Martin, C.R.
|
|
2004
|
12 |
1-2 |
p. 53-68
|
artikel
|
| 11 |
Thin Film Piezoelectrics for MEMS
|
Trolier-McKinstry, S.
|
|
2004
|
12 |
1-2 |
p. 7-17
|
artikel
|
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