| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A highly flexible design and production framework for modularized microelectromechanical systems
|
Schuenemann, M.
|
|
1999
|
73 |
1-2 |
p. 153-168
16 p.
|
artikel
|
| 2 |
A MEMS electrostatic particle transportation system
|
Desai, Amish
|
|
1999
|
73 |
1-2 |
p. 37-44
8 p.
|
artikel
|
| 3 |
A micro cell lysis device
|
Lee, Sang-Wook
|
|
1999
|
73 |
1-2 |
p. 74-79
6 p.
|
artikel
|
| 4 |
A new silicon rate gyroscope
|
Geiger, W.
|
|
1999
|
73 |
1-2 |
p. 45-51
7 p.
|
artikel
|
| 5 |
Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation
|
Sato, Kazuo
|
|
1999
|
73 |
1-2 |
p. 131-137
7 p.
|
artikel
|
| 6 |
A novel silicon surface micromachining angle sensor
|
Kaienburg, Jörg R.
|
|
1999
|
73 |
1-2 |
p. 68-73
6 p.
|
artikel
|
| 7 |
Application of sol–gel deposited thin PZT film for actuation of 1D and 2D scanners
|
Schroth, A.
|
|
1999
|
73 |
1-2 |
p. 144-152
9 p.
|
artikel
|
| 8 |
Capacitive type surface-micromachined silicon accelerometer with stiffness tuning capability
|
Park, Kyu-Yeon
|
|
1999
|
73 |
1-2 |
p. 109-116
8 p.
|
artikel
|
| 9 |
Contact measurements providing basic design data for microrelay actuators
|
Schimkat, J.
|
|
1999
|
73 |
1-2 |
p. 138-143
6 p.
|
artikel
|
| 10 |
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
|
Lutwyche, M.
|
|
1999
|
73 |
1-2 |
p. 89-94
6 p.
|
artikel
|
| 11 |
Diamond replicas from microstructured silicon masters
|
Björkman, H.
|
|
1999
|
73 |
1-2 |
p. 24-29
6 p.
|
artikel
|
| 12 |
3D microfabrication by combining microstereolithography and thick resist UV lithography
|
Bertsch, A.
|
|
1999
|
73 |
1-2 |
p. 14-23
10 p.
|
artikel
|
| 13 |
Dual-axis microgyroscope with closed-loop detection
|
An, S.
|
|
1999
|
73 |
1-2 |
p. 1-6
6 p.
|
artikel
|
| 14 |
Experimental evaluation of anodic bonding process based on the Taguchi analysis of interfacial fracture toughness
|
Go, Jeung Sang
|
|
1999
|
73 |
1-2 |
p. 52-57
6 p.
|
artikel
|
| 15 |
Fabrication of free standing structure using single step electrochemical etching in hydrofluoric acid
|
Ohji, H.
|
|
1999
|
73 |
1-2 |
p. 95-100
6 p.
|
artikel
|
| 16 |
Flow control by using high-aspect-ratio, in-plane microactuators
|
Sherman, Faiz
|
|
1999
|
73 |
1-2 |
p. 169-175
7 p.
|
artikel
|
| 17 |
Integrated silica micro-opto-electromechanical steering device for laser beam scanning
|
Petroz, Karine
|
|
1999
|
73 |
1-2 |
p. 117-121
5 p.
|
artikel
|
| 18 |
Laminar fluid behavior in microchannels using micropolar fluid theory
|
Papautsky, Ian
|
|
1999
|
73 |
1-2 |
p. 101-108
8 p.
|
artikel
|
| 19 |
Low power integrated pressure sensor system for medical applications
|
Hierold, C
|
|
1999
|
73 |
1-2 |
p. 58-67
10 p.
|
artikel
|
| 20 |
Mesoscale actuator device: micro interlocking mechanism to transfer macro load
|
Chen, Quanfang
|
|
1999
|
73 |
1-2 |
p. 30-36
7 p.
|
artikel
|
| 21 |
Micromachined membrane particle filters
|
Yang, Xing
|
|
1999
|
73 |
1-2 |
p. 184-191
8 p.
|
artikel
|
| 22 |
Micromachining by ion track lithography
|
Thornell, Greger
|
|
1999
|
73 |
1-2 |
p. 176-183
8 p.
|
artikel
|
| 23 |
Roughening of single-crystal silicon surface etched by KOH water solution
|
Sato, Kazuo
|
|
1999
|
73 |
1-2 |
p. 122-130
9 p.
|
artikel
|
| 24 |
Sensors and actuators on non-planar substrates
|
Li, Wen J.
|
|
1999
|
73 |
1-2 |
p. 80-88
9 p.
|
artikel
|
| 25 |
Thermal flow sensor for liquids and gases based on combinations of two principles
|
Ashauer, M.
|
|
1999
|
73 |
1-2 |
p. 7-13
7 p.
|
artikel
|
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