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Journal description
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Details for article 56 of 59 found articles
| Title: |
TEM Observation of Microstructural Change of Silicon Single Crystal Caused by Scratching Tests Using SPM |
| Author: |
Takagi, M. Onodera, K. Iwata, H. Imura, T. Sasaki, K. Saka, H. |
| Appeared in: |
MRS proceedings |
| Paging: | Volume 841 () nr. 1 pages xx |
| Year: |
2005-04-01 |
| Contents: | |
| Publisher: |
Springer International Publishing, Cham |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 56 of 59 found articles
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