|
Dependence of thermal stability of NiSi and Ni(Pt)Si /Si on crystal orientation |
|
|
|
Title: |
Dependence of thermal stability of NiSi and Ni(Pt)Si /Si on crystal orientation |
Author: |
Okubo, Kazuya Kawamura, Kazuo Akiyama, Shinich Kotaka, Yasutoshi Itani, Tsukasa Watatani, Hirofumi Yanai, Kenichi Nakaishi, Masafumi Kase, Masataka |
Appeared in: |
MRS proceedings |
Paging: |
Volume 1079 () nr. 1 pages xx |
Year: |
2008-12-01 |
Contents: |
|
Publisher: |
Springer International Publishing, Cham |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|