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Journal description
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Details for article 17 of 32 found articles
| Title: |
Moisture Adsorption in Plasma-Damaged Porous Low-k Dielectrics |
| Author: |
Vinogradova, Ekaterina Casey, E. Smith Mueller, D. W. Andrew, J. McKerrow Reidy, Rick |
| Appeared in: |
MRS proceedings |
| Paging: | Volume 1079 () nr. 1 pages xx |
| Year: |
2008-12-01 |
| Contents: | |
| Publisher: |
Springer International Publishing, Cham |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 32 found articles
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