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Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma |
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Titel: |
Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma |
Auteur: |
Otaka, Michihiro Arima, Toshiaki Lai, Jiansyun Ikeda, Kizuki Kamataki, Kunihiro Yamashita, Naoto Okumura, Takamasa Itagaki, Naho Koga, Kazunori Shiratani, Masaharu |
Verschenen in: |
MRS advances |
Paginering: |
Jaargang 7 () nr. 31 pagina's 918-922 |
Jaar: |
2022-07-11 |
Inhoud: |
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Uitgever: |
Springer International Publishing, Cham |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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