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Journal description
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Details for article 17 of 83 found articles
| Title: |
Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors |
| Author: |
Matsukuma, Hiraku Adachi, Keisuke Sugawara, Takuma Shimizu, Yuki Gao, Wei Niwa, Eiji Sasaki, Yoshihiro |
| Appeared in: |
Nanomanufacturing and metrology |
| Paging: | Volume 4 () nr. 1 pages 53-66 |
| Year: |
2021-01-21 |
| Contents: | |
| Publisher: |
Springer Nature Singapore, Singapore |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 83 found articles
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