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Journal description
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Details for article 1 of 17 found articles
| Title: |
Achieving nanoscale horizontal separations in the standard 2 μm PolyMUMPS process |
| Author: |
Elshurafa, A. M. Salama, K. N. |
| Appeared in: |
Applied nanoscience |
| Paging: | Volume 4 (2013) nr. 2 pages 241-246 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 17 found articles
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