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| Titel: |
Characterization of Resonant Behavior and Sensitivity Using Micromachined PZT Cantilever |
| Auteur: |
Lee, Jeong Hoon Yoon, Ki Hyun Kim, Tae Song |
| Verschenen in: |
Integrated ferroelectrics |
| Paginering: | Jaargang 50 (2002) nr. 1 pagina's 43-52 |
| Jaar: |
2002 |
| Inhoud: |
Micromachined piezoelectric cantilevers have been fabricated using PZT (52/58) films. Electromechanical characteristics of micromachined PZT cantilever were measured by laser vibrometer system as a function of cantilever length for the cantilever with two different supported layer thickness respectively. The 1 st version unimorph cantilever consists of a 0.6 z -thick PZT layer on 1.5 z -thick SiN x elastic supported layer. In order to increase Q-factor in air and liquid, from calculated spring constant as a function of variable supporting layer thickness, 2 nd version cantilever was designed to have a 0.8 z -thick PZT layer on 4.5 z -thick SiN x /Si elastic supported layer. The gravimetric sensitivities of cantilever in air were characterized by Au deposition on the backside of cantilever. The gravimetric sensitivity of 100 ×200 z -dimension cantilever was 300 cm 2 /g and the mass of 5 ng was detectable. |
| Uitgever: |
Taylor & Francis |
| Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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