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Details for article 7 of 7 found articles
| Title: |
Preparation and characteristics of lead titanate by glow discharge using metal-organic precursors |
| Author: |
Lee, Won Gyu Woo, Seong Ihl |
| Appeared in: |
Integrated ferroelectrics |
| Paging: | Volume 5 (1994) nr. 2 pages 107-118 |
| Year: |
1994-10-01 |
| Contents: |
PbTiO3 thin films on Si substrate were prepared by plasma enhanced chemical vapor deposition (PECVD) using Ti(O-i-C3H7)4, Pb(C2H5)4 and oxygen. The composition of PECVD PbTiO3 thin films was intensively influenced by the input flow rate ratio of precursors, while it was independent of the deposition temperatures. As-deposited PECVD PbTiO3 thin film showed a uniform distribution of the Pb, Ti and C component throughout the bulk of film. The PECVD PbTiO3 thin films after annealing at 650°C under O2 ambient for 1 hr were converted from the amorphous phase to the crystalline perovskite phase. The phase transition between the tetragonal and the cubic phase occurred at about 500°C. The properties of thin films such as morphology, structure, dielectric constant, leakage current and P-E hysteresis-were also investigated. |
| Publisher: |
Taylor & Francis |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 7 found articles
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