Pb(Zr, Ti)O3 thin film growth on yttrium-treated Si(100)
Titel:
Pb(Zr, Ti)O3 thin film growth on yttrium-treated Si(100)
Auteur:
Wu, N. J. Ignatiev, A. Mesarwi, A. Shih, H. D.
Verschenen in:
Integrated ferroelectrics
Paginering:
Jaargang 3 (1993) nr. 2 pagina's 139-145
Jaar:
1993-06-01
Inhoud:
Pulsed laser ablation has been used to deposit ferroelectric Pb(Zr, Ti)O3 (PZT) thin films on Si(100) and on yttrium-treated Si(100) substrates. The yttrium (Y) treatment of a Si surface followed by oxidation resulted in formation of a very thin, Y-enhanced SiO2 antidiffusion barrier layer, thereby suppressing the undesirable PZT/Si interdiffusion. The best PZT film grown on Y-treated Si(100) had a breakdown voltage of 0.6 MV/cm, a coercive field of 71 KV/cm, and a remanent polarization of 18 μC/cm2.